Design optimization of silicon cantilever for strain based MEMS position sensor
DOI:
https://doi.org/10.58368/MTT.23.3-4.2024.1-6Keywords:
Silicon Cantilever, Position Sensor, Surface Roughness, StrainAbstract
Micro-cantilevers are often used in various fields of science and engineering, particularly in sensing and nanotechnology. These are integral components in MEMS (Micro-Electro-Mechanical Systems) devices such as position sensor, pressure sensor, Accelerometer etc. Silicon is a most preferred material for micro-cantilevers due to its mechanical strength and ease of fabrication. This study investigates the design and mechanical behavior of two different configuration i.e., without and with anchor silicon cantilever beam by comparing theoretical calculations with finite element simulation results. Theoretical deflection was calculated using Euler- Bernoulli beam theory, while simulations were conducted using a finite element analysis (FEA) software. This work involves experimental analysis and computational simulations to measure strain and deflection in both scenarios. The strain to deflection ratios is found out to be higher in case of configuration 2 which indicates that configuration 2 has better sensitivity than configuration 1.
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